Not known Facts About Noohapou
Not known Facts About Noohapou
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Remote spots: Static units are generally situated remotely, escalating Value and decreasing In general system performance.
Device & TCU software calibration techniques range exterior examination equipment not applied consistently for verifying
Using the POU3500, it is possible to achieve unparalleled leads to etch overall performance, chamber uptime, lessened cost of possession and fab Place utilization – all even though strengthening your process reliability.
Originally Launched in 1985, our company has developed right into a acknowledged chief in giving temperature Manage techniques to the global semiconductor field.
LAUDA-Noah will, for just a consumer's retrofit evaluation, check and adjust its fluid temperature Handle profiles to match an present TCUs' in order to guarantee a easy system integration through DAQ.
we have been guided within read more our perception that prosperity During this competitive sector stems from supplying shoppers with really engineered new products and environment course customer service.
The accuracy in the POU 3500 permits impartial control of the procedure fluid temperature towards the wafer chuck in just +/- 0.1 °C of set position, as well as fast reaction time in the program enables for max wafer-to-wafer repeatability all over the etch course of action.
With the POU3300, you'll be able to realize unparalleled ends in etch general performance, chamber uptime, lowered cost of possession and fab Area utilization – all whilst bettering your approach trustworthiness.
The data pertains to some 300mm chamber temperature profile for the duration of a significant part ratio Etch process, running at incredibly higher RF electrical power situations (~3.8kW). The persuasive areas of this data set are:
LAUDA-Noah is meeting these new troubles and it has incorporated energy saving technology in devices which might be helpful on the ecosystem and possess a low price to operate.
The TEs' can switch straight from heating to cooling, or visa-versa. They can turn on & off though in the heating or cooling manner and will increase or lessen the quantity of heating or cooling with no switching in anyway.
More than at any time, shrinking device geometries, demanding new procedures along with a really aggressive natural environment need temperature control systems that Merge rapidly and accurate temperature Handle having an emphasis on minimized running prices and improved trustworthiness.
the truth is always that accurate Dynamic Temperature Command can only be realized when all 5 (5) of the next procedure style and installation requirements are met:
(as a result, putting in a static unit close to chamber will never empower it to offer dynamic temperature Manage)
We require significantly less cooling/heating potential for the same application like a static TCU as a consequence of our tiny reservoir quantity.
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